Optical film thickness measurement

* see detailed specification for available configurations of MProbe 20 thin film thickness measuremnt system in brochures below

• Flexible: modular thin film thickness measurement system: select the best configuration for your application and easily upgrade when needed
• Precision: unmatched precision <0.01nm or 0.01%
• Materials: 500+ extended material database
• Integration: easy integration TCP server
• Affordable: unmatched price/performance
• Main unit (includes spectrometer, light source, light controller microprocessor)
• SH200A sample table with focusing lens and fine adjustment
• Fiberoptics reflectance probe

Technical specifications

BASIC SPECIFICATION: Wavelength range: 400-1000nm Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide) Accuracy: <1nm or 0.2% (filmstack dependent) Measurement:< 100ms (typical, depends on sample reflectivity) Spot size: <0.5mm Sample size: >20mm Custom probes can be designed on request

• Support primer or interface (IPL) layers
• Thickness measurement on curved surfaces and/or large parts
• Can measure colored products, corrects for backside reflection
• Materials: 500+ extended material database
• One click reliable measurement
• Software: user friendly desktop interface and feature rich TFCompanion software can handle even most complex applications.
• Affordable: unmatched price/performance
• A complete system (PC is optional)

Technical specifications

Our thickness measurement system effectively measures thin film and thick sheets with multilayer descrimination;clear, colored and tinted films; organic or water-based coating and adhesives. Measure thickness of barrier films – such as Nylon,EVOH or PVD simulteneously with other polymers such as PR,PP and Ionomer. Thickness of coating on polymer, glass, metal, plastic,semiconductors and other non-porous materials.

• Multipoint configuration has a stationary main multi-channel measurement system and fiberoptics probes at fixed positions on production line.
• Scanner configuration has a measurement head mounted on a scanner, that moves continuously across production line
• Flexible configuration: integration with PC or PLC
• TCP-IP (1Gb) fast and reliable communication
• System custom configured for application requirements
• Different models depending the wavelength, thickness range and measurement speed
• Firmware embedded data analysis option (TFC inside) for exceptionally fast measurement
• Measurement of reflectance and/or transmittance spectra at specified wavelength range

Technical specifications

In-situ real-time optical thickness monitor for measurement of thin film thickness and n&k (optical constants). The system can work in high ambient light environment, because it is using gated data acquisition. Accurate measurement in a broadband (UV-NIR) wavelength range using high-intensity flash Xe lamp.

• In-situ thin film thickness and n&k measurement
• Gated data acquisition for measurement in high ambient light environment
• Materials: 500+ extended material database
• Continuous, fast and reliable measurement
• Flexible configuration – fully customized to match depositiom chamber geometry

Technical specifications

Full specification available on request.

Thin film measurement system. Practically, any transluscent film can be measured quickly and reliably.

• Fast measurement on low and high reflectivity samples. Constant/ predictable measurement frequency. Typically, 10Hz – 20Hz
• The same unmatched precision as other desktop MProbe systems (<0.01nm)
• Can be used in high ambient light environment due to gated acquisition
• Materials: 500+ extended material database
• Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more.
• Affordable: unmatched price/performance
• Main unit (includes spectrometer, light source)
• Fiberoptics reflectance probe

Technical specifications

Film thickness measurement in small spot is used in several types of applications:

• on cylindrical or curved surfaces – syringes, stents, pins, wires, etc. A small spot creates a flat field to achieve accurate measurement even on a highly curved surface
• non-uniform, rough coatings or light scattering material like high haze or nanoparticles infused films. Small spot localize the measurement and minimize the effects of light scattering and non-uniformity
• patterned wafers, MEMS and other application requiring high lateral resolution / measurement in small areas.
• Flexible modular system: select the best configuration for your application.
• Precision: unmatched precision <0.01nm or 0.01%
• Materials: 500+ extended material database
• Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more.
• Integrated camera and imaging software allows to pinpoint measurement location and display results directly on the image

Technical specifications

Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide) Accuracy: <1nm or 0.2% (filmstack dependent) Stability:< 0.02nm or 0.2% (daily measurements for 20 days) Spot size: 4μm to 200μm (typical- depending on objective used) Sample size: up to 300 mm Mapping stage: 0.5 μm resolution, 1μm repeatability Z-axis: 0.25 μm resolution, 0.5μm repeatability

• A turnkey system with mapping automation that is flexible and modular
• Precision: unmatched precision <0.01nm or 0.01%
• Materials: 500+ extended material database
• Affordable: unmatched price/performance
• Main unit (includes spectrometer, light source)
• Solid platform with motorized mapping stage and controller
• Microscope tube on z-axis motorized stage or a bracket with standard lens (depending on configuration)
• Fiberoptics reflectance probe

Technical specifications